서브비주얼

周星Milestone

world’s first
Technology

Semiconductor
History

  • 1947

    Transistor

  • 1968

    DRAM

  • 1971

    CPU

  • 1987

    DRAM

  • Single Tube Vertical LPCVD

1993

  • Selective HSG / Capacitor
  • Warm Wall Type MOCVD/Cap.

1995

  • High-k MO-CVD Cap.
  • High-k ALD Cap.
  • Parallel Resonance Antenna ICP HDP

1997

  • Transistor Channel:Selective Epi
  • Parallel Resonance Antenna ICP Etcher
  • III-V MOCVD Development

1998

  • PECVD for LCD

1999

  • SD (ALD & CVD)

2000

  • LSP Tech.

2002

  • SDP (ALD & CVD)

2003

  • Thin Film & Crystalline Solar Tech.
  • TSD Tech.

2005

  • HJT Solar Tech.

2006

  • TSD-ALD & CVD

2007

  • LSP-HDP

2008

  • LSP-Etcher

2011

  • ALD-Guidance Series

2014

  • Selective ALG Tech.

2018

  • ALD Perovskite Solar Tech.
  • ALG Ru
  • ALG Cu

2020

  • 2HGA Perovskite Material
    (STO, PZT, BST etc.)

2021

  • ALG SiC, Graphene.

2022

  • III-V Display

2023

  • III-V Solar

2024

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